The Economy Dry Oxygen Vacuum Pump PDC-OPE meets the requirements for use with Harrick Plasma cleaners. Oxygen-compatible, oil-free pumping for reliable plasma cleaning and surface activation in microfluidics, including PDMS activation and PDMS-glass bonding.
General
Harrick Plasma plasma cleaners require an external vacuum pump with a minimum pumping speed of 1.4 m3/h (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or lower.
This dry (oil-free) pump is suitable for oxygen service as well as nonreactive or inert gases (air, N2, Ar). It uses no hydrocarbon oil, thereby avoiding the safety risks associated with concentrated oxygen and hydrocarbon pump oil.
Note: the pump manufacturer specifies ultimate pressure at 250 mTorr; in Harrick lab tests, ultimate pressures below 100 mTorr were attained.
The pump kit includes everything needed to connect and operate safely:
- Pump inlet kit: hose, hose clamps, hose adaptor, centering ring, and swing clamp (to connect the plasma cleaner to the pump inlet)
- Pump outlet kit: exhaust connection to conduct pump exhaust to a vent hood, with a 2.7 m (9 ft) exhaust hose
Content
1x PDC-OPE (115 V) or PDC-OPE-2 (230 V) economy dry oxygen vacuum pump
1x Inlet connection kit with hose, hose clamps, hose adaptor, centering ring, and swing clamp
1x Outlet connection kit with 9 ft. hose and hose clamps
Specifications
| |
PDC-OPE |
PDC-OPE-2 |
| Compatible gases |
Non-corrosive, explosive, or particulate-forming |
| Pump Rate Max (50Hz) |
50 L/min | 3.0 m3/h |
| Pump Rate Max (60Hz) |
60 L/min | 3.6 m3/h |
| Final Pressure |
< 1 mbar | 100-250 mTorr |
| Noise Level (at 3ft) |
55 dB(A) |
| Dimensions (l x w x h) |
178 mm × 356 mm × 140 mm | 7" x 14" x 5.5" |
| Weight |
9.5 kg | 21 lbs |
| Connection Diameter (Inlet/Outlet) |
NW16 KF flange / Female 1/4" NPT (10 mm hose barb provided) |
| AC Supply Frequency |
60Hz |
50-60Hz |
| Pressure Supply Voltage |
115 V |
230 V |
Documentation
Datasheet
Operating instructions
