The POLOS SPIN150x Liners are reusable anti-static PET liners designed to protect the spin bowl and lid during coating, developing, and chemical processing applications.
General
The POLOS SPIN150x Liner Set is designed for use with the POLOS SPIN150x spin coater series, helping reduce contamination, simplify cleaning, and protect the process chamber during spin coating and substrate processing applications.
Each set includes a transparent lid liner and bowl liner manufactured from 0.5 mm PET (Polyethylene Terephthalate) with anti-static properties to minimize particle attraction and static build-up during cleanroom operation.
The mechanically strong liners can be easily cleaned and re-used between processes, allowing faster setup for the next user or coating application while helping maintain a cleaner process environment.
The liners are suitable for semiconductor, cleanroom, laboratory, photoresist, polyimide, and related coating or wet process applications.
Features & Benefits
- Cleanroom compatible: Transparent anti-static PET construction helps minimize contamination and static build-up.
- Protects the process chamber: Helps reduce chemical exposure and contamination inside the spin bowl and lid area.
- Reusable design: Mechanically strong liners can be cleaned and re-used for multiple processing cycles.
- Faster process turnaround: Simplifies cleaning between users, substrates, or coating chemistries.
- Chemical process compatibility: Suitable for photoresist, polyimide, developing, cleaning, and related wet process applications.
- Optimised for the SPIN150x: Designed specifically for compatibility with the POLOS SPIN150x spin coater platform.
Applications
The POLOS SPIN150x liners are suitable for cleanroom and laboratory substrate processing environments where contamination control and simplified chamber cleaning are important.
- Spin coating
- Positive and negative photoresist processing
- Polyimide coating
- Developing processes
- Cleaning and rinse/dry applications
- Semiconductor and cleanroom processing
- Research and development environments
Content
20x Lid liners for POLOS SPIN150x
20x Bowl liners for POLOS SPIN150x
Specifications
| Compatible system |
POLOS® SPIN150x |
| Set contents |
Lid liner and bowl liner |
| Pack quantity |
20 sets |
| Material |
PET (Polyethylene Terephthalate) |
| Thickness |
0.5 mm |
| Surface properties |
Transparent and anti-static |
| Reusable |
Yes |
| Recyclable |
Yes |
